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تسجيل مستخدم جديدA New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
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EDA Publishing Association
تاريخ النشر
2008
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الهندسة المعلوماتية
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This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.
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