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تسجيل مستخدم جديدArchitecture for Integrated Mems Resonators Quality Factor Measurement
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نشر من قبل
EDA Publishing Association
تاريخ النشر
2008
مجال البحث
الهندسة المعلوماتية
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English
تأليف
H. Mathias
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In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the components non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
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