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تسجيل مستخدم جديدMechanical Fatigue on Gold MEMS Devices: Experimental Results
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EDA Publishing Association
تاريخ النشر
2008
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الهندسة المعلوماتية
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English
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The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage measurements. Measurements are performed by means of the optical interferometric technique.
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