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Design and Fabrication of a Novel Micro Electromagnetic Actuator

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 نشر من قبل EDA Publishing Association
 تاريخ النشر 2008
  مجال البحث الهندسة المعلوماتية
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The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.

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