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The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integrate with these small or portable devices. Several different ambient sources, including solar, vibration and temperature effect, have already exploited [1-3]. Each energy source should be used in suitable environment, therefore to produce maximum efficiency. In this paper, we present an acoustic wave actuated micro-generator for power system by using the energy of acoustic waves, such as the sound from human voices or speakerphone, to actuate a MEMS-type electromagnetic transducer. This provides a longer device lifetime and greater power system convenience. Moreover, it is convenient to integrate MEMS-based microgenerators with small or porta le devices
In this article we describe our efforts of extending demand-side control concepts to the application in portable electronic devices, such as laptop computers, mobile phones and tablet computers. As these devices feature built-in energy storage (in th
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagne
A novel fabrication process, which uses wafer transfer and micro-electroplating technique, has been proposed and tested. In this paper, the effects of the diaphragm thickness and stress, the air-gap thickness, and the area ratio of acoustic holes to
We present a design for a continuous-wave (CW) atom laser on a chip and describe the process used to fabricate the device. Our design aims to integrate quadrupole magnetic guiding of ground state Rb atoms with continuous surface adsorption evaporativ
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as resonator subst