Mn doped tin oxide transparent conducting thin films were deposited at a
substrate temperature of 450°C by spray pyrolysis method. Structural
properties of the films were investigated as a function of various Mn-doping
levels (0, 1, 3, 5, 7 wt%) w
hile all other deposition parameters such as
substrate temperature, spray rate, carrier gas pressure and distance between
spray nozzle to substrate were kept constant.
