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Measurement of thermal conductance of silicon nanowires at low temperature

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 نشر من قبل Olivier Bourgeois
 تاريخ النشر 2006
  مجال البحث فيزياء
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 تأليف Olivier Bourgeois




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We have performed thermal conductance measurements on individual single crystalline silicon suspended nanowires. The nanowires (130 nm thick and 200 nm wide) are fabricated by e-beam lithography and suspended between two separated pads on Silicon On Insulator (SOI) substrate. We measure the thermal conductance of the phonon wave guide by the 3 method. The cross-section of the nanowire approaches the dominant phonon wavelength in silicon which is of the order of 100 nm at 1K. Above 1.3K the conductance behaves as T3, but a deviation is measured at the lowest temperature which can be attributed to the reduced geometry.

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