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In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode surface characteristics. For this latter, we consider and vary the coefficients that characterize the elastic reflection of the electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on Particle-in-Cell/Monte Carlo Collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to affect slightly the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform,
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot
We demonstrate experimentally that the void in capacitively-coupled RF complex plasmas can exist in two qualitative different regimes. The bright void is characterized by bright plasma emission associated with the void, whereas the dim void possesses
An 18-level argon collisional radiative model (CRM) suitable for low pressure was established. The model can be solved by combining the optical emission spectroscopy (OES) with Langmuir probe calibration. In the capacitively coupled plasmas (CCPs) wi
Electron evaporation plays an important role in the electron temperature evolution and thus expansion rate in low-density ultracold plasmas. In addition, evaporation is useful as a potential tool for obtaining colder electron temperatures and charact