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An 18-level argon collisional radiative model (CRM) suitable for low pressure was established. The model can be solved by combining the optical emission spectroscopy (OES) with Langmuir probe calibration. In the capacitively coupled plasmas (CCPs) with different frequency and power, the electron temperature and density obtained by the model were compared with those measured by Langmuir probe. It is found that the calibration point at any frequency or power is suitable for the fixed pressure. This method was then applied to the diagnosis of triple-frequency (TF) CCPs, it is shown that the high frequency (HF) power mainly controls the electron density, the low frequency (LF) power mainly controls the electron temperature, and the intermediate frequency (IF) power was between the two. Compared with the dual-frequency (DF) CCPs, it is found that with the increase of IF power, the HF power can control the electron density more independently with less influence on the electron temperature.
The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximation is utilized within the framework of two different fluid models whi
We study the use of frequency upconversion schemes of near-IR picosecond laser pulses and compare their ability to guide and trigger electric discharges through filamentation in air. Upconversion, such as Second Harmonic Generation, is favorable for
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode surface cha
We demonstrate experimentally that the void in capacitively-coupled RF complex plasmas can exist in two qualitative different regimes. The bright void is characterized by bright plasma emission associated with the void, whereas the dim void possesses