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This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a micro combustor, a turbine and a centrifugal compressor. Comprehensive simulation has been implemented to optimal the component design. We have successfully demonstrated a silicon-based micro combustor, which consists of seven layers of silicon structures. A hairpin-shaped design is applied to the fuel/air recirculation channel. The micro combustor can sustain a stable combustion with an exit temperature as high as 1600 K. We have also successfully developed a micro turbine device, which is equipped with enhanced micro air-bearings and driven by compressed air. A rotation speed of 15,000 rpm has been demonstrated during lab test. In this paper, we will introduce our research results major in the development of micro combustor and micro turbine test device.
We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2Te3 thermocouples in a SU-8 mold. Demonstrator devices generate 278uWcm-2 at dTmeas=40K across the experimental set
Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities a
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas
In the design flow of integrated circuits, chip-level verification is an important step that sanity checks the performance is as expected. Power grid verification is one of the most expensive and time-consuming steps of chip-level verification, due t
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagne