We demonstrate broad-band reconfiguration of coupled photonic crystal nanobeam cavities by using optical gradient force induced mechanical actuation. Propagating waveguide modes that exist over wide wavelength range are used to actuate the structures
and in that way control the resonance of localized cavity mode. Using this all-optical approach, more than 18 linewidths of tuning range is demonstrated. Using on-chip temperature self-referencing method that we developed, we determined that 20 % of the total tuning was due to optomechanical reconfiguration and the rest due to thermo-optic effects. Independent control of mechanical and optical resonances of our structures, by means of optical stiffening, is also demonstrated.
We experimentally demonstrate high Quality factor dual-polarized TE-TM photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed using both tapered optical fiber and free-space reso
nant scattering set-ups. We measure Q-factors greater than 10^4 for both TM and TE modes, and observe large fiber transmission drops (0.3 -- 0.4) at the TM mode resonances.
Wavelength-scale, high Q-factor photonic crystal cavities have emerged as a platform of choice for on-chip manipulation of optical signals, with applications ranging from low-power optical signal processing and cavity quantum electrodynamics, to bioc
hemical sensing. Many of these applications, however, are limited by the fabrication tolerances and the inability to precisely control the resonant wavelength of fabricated structures. Various techniques for post-fabrication wavelength trimming and dynamical wavelength control -- using, for example, thermal effects, free carrier injection, low temperature gas condensation, and immersion in fluids -- have been explored. However, these methods are often limited by small tuning ranges, high power consumption, or the inability to tune continuously or reversibly. In this letter, by combining nano-electro-mechanical systems (NEMS) and nanophotonics, we demonstrate reconfigurable photonic crystal nanobeam cavities that can be continuously and dynamically tuned using electrostatic forces. A tuning of ~10 nm has been demonstrated with less than 6 V of external bias and negligible steady-state power consumption.
We describe the design, fabrication, and spectroscopy of coupled, high Quality (Q) factor silicon nanobeam photonic crystal cavities. We show that the single nanobeam cavity modes are coupled into even and odd superposition modes, and we simulate the
frequency and Q factor as a function of nanobeam spacing, demonstrating that a differential wavelength shift of 70 nm between the two modes is possible while maintaining Q factors greater than 10^6. For both on-substrate and free-standing nanobeams, we experimentally monitor the response of the even mode as the gap is varied, and measure Q factors as high as 200,000.
We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed
cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.
