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We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.
We describe the design, fabrication, and spectroscopy of coupled, high Quality (Q) factor silicon nanobeam photonic crystal cavities. We show that the single nanobeam cavity modes are coupled into even and odd superposition modes, and we simulate the
Wavelength-scale, high Q-factor photonic crystal cavities have emerged as a platform of choice for on-chip manipulation of optical signals, with applications ranging from low-power optical signal processing and cavity quantum electrodynamics, to bioc
We experimentally demonstrate high Quality factor dual-polarized TE-TM photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed using both tapered optical fiber and free-space reso
Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index (n $approx$ 2.0). We present the fabrication and characterization of Si3N4 photonic crystal nanobeam
We present results on electrically driven nanobeam photonic crystal cavities formed out of a lateral p-i-n junction in gallium arsenide. Despite their small conducting dimensions, nanobeams have robust electrical properties with high current densitie