A beam size monitor so called Shintake monitor, which uses the inverse Compton scattering between the laser interference fringe and the electron beam was designed for and installed at ATF2. The commissioning at ATF2 was started in the end of 2008 and
succeeded in the measurement of the fringe pattern from the scattered gamma-rays. The present status of the Shintake monitor is described here.
We developed an electron beam size monitor for extremely small beam sizes. It uses a laser interference fringe for a scattering target with the electron beam. Our target performance is < 2 nm systematic error for 37 nm beam size and < 10% statistical
error in a measurement using 90 electron bunches for 25 - 6000 nm beam size. A precise laser interference fringe control system using an active feedback function is incorporated to the monitor to achieve the target performance. We describe an overall design, implementations, and performance estimations of the monitor.
