Phase-mask coronagraphs are known to provide high contrast imaging capabilities while preserving a small inner working angle, which allows searching for exoplanets or circumstellar disks with smaller telescopes or at longer wavelengths. The AGPM (Ann
ular Groove Phase Mask, Mawet et al. 2005) is an optical vectorial vortex coronagraph (or vector vortex) induced by a rotationally symmetric subwavelength grating (i.e. with a period smaller than {lambda}/n, {lambda} being the observed wavelength and n the refractive index of the grating substrate). In this paper, we present our first mid- infrared AGPM prototypes imprinted on a diamond substrate. We firstly give an extrapolation of the expected coronagraph performances in the N-band (~10 {mu}m), and prospects for down-scaling the technology to the most wanted L- band (~3.5 {mu}m). We then present the manufacturing and measurement results, using diamond-optimized microfabrication techniques such as nano-imprint lithography (NIL) and reactive ion etching (RIE). Finally, the subwavelength grating profile metrology combines surface metrology (scanning electron microscopy, atomic force microscopy, white light interferometry) with diffractometry on an optical polarimetric bench and cross correlation with theoretical simulations using rigorous coupled wave analysis (RCWA).
In recent years, phase mask coronagraphy has become increasingly efficient in imaging the close environment of stars, enabling the search for exoplanets and circumstellar disks. Coronagraphs are ideally suited instruments, characterized by high dynam
ic range imaging capabilities, while preserving a small inner working angle. The AGPM (Annular Groove Phase Mask, Mawet et al. 2005) consists of a vector vortex induced by a rotationally symmetric subwavelength grating. This technique constitutes an almost unique solution to the achromatization at longer wavelengths (mid-infrared). For this reason, we have specially conceived a mid-infrared AGPM coronagraph for the forthcoming upgrade of VISIR, the mid-IR imager and spectrograph on the VLT at ESO (Paranal), in collaboration with members of the VISIR consortium. The implementation phase of the VISIR Upgrade Project is foreseen for May-August 2012, and the AGPM installed will cover the 11-13.2 {mu}m spectral range. In this paper, we present the entire fabrication process of our AGPM imprinted on a diamond substrate. Diamond is an ideal material for mid-infrared wavelengths owing to its high transparency, small dispersion, extremely low thermal expansion and outstanding mechanical and chemical properties. The design process has been performed with an algorithm based on the rigorous coupled wave analysis (RCWA), and the micro-fabrication has been carried out using nano-imprint lithography and reactive ion etching. A precise grating profile metrology has also been conducted using cleaving techniques. Finally, we show the deposit of fiducials (i.e. centering marks) with Aerosol Jet Printing (AJP). We conclude with the ultimate coronagraph expected performances.
(abridged) Vortex coronagraphs are among the most promising solutions to perform high contrast imaging at small angular separations. They feature a very small inner working angle, a clear 360 degree discovery space, have demonstrated very high contra
st capabilities, are easy to implement on high-contrast imaging instruments, and have already been extensively tested on the sky. Since 2005, we have been designing, developing and testing an implementation of the charge-2 vector vortex phase mask based on concentric subwavelength gratings, referred to as the Annular Groove Phase Mask (AGPM). Science-grade mid-infrared AGPMs were produced in 2012 for the first time, using plasma etching on synthetic diamond substrates. They have been validated on a coronagraphic test bench, showing broadband peak rejection up to 500:1 in the L band, which translates into a raw contrast of about $6times 10^{-5}$ at $2 lambda/D$. Three of them have now been installed on world-leading diffraction-limited infrared cameras (VLT/NACO, VLT/VISIR and LBT/LMIRCam). During the science verification observations with our L-band AGPM on NACO, we observed the beta Pictoris system and obtained unprecedented sensitivity limits to planetary companions down to the diffraction limit ($0.1$). More recently, we obtained new images of the HR 8799 system at L band during the AGPM first light on LMIRCam. After reviewing these first results obtained with mid-infrared AGPMs, we will discuss the short- and mid-term goals of the on-going VORTEX project, which aims to improve the performance of our vortex phase masks for future applications on second-generation high-contrast imagers and on future extremely large telescopes (ELTs).
Coronagraphy is a powerful technique to achieve high contrast imaging and hence to image faint companions around bright targets. Various concepts have been used in the visible and near-infrared regimes, while coronagraphic applications in the mid-inf
rared remain nowadays largely unexplored. Vector vortex phase masks based on concentric subwavelength gratings show great promise for such applications. We aim at producing and validating the first high-performance broadband focal plane phase mask coronagraphs for applications in the mid-infrared regime, and in particular the L band with a fractional bandwidth of ~16% (3.5-4.1 mu m). Based on rigorous coupled wave analysis, we designed an annular groove phase mask (AGPM) producing a vortex effect in the L band, and etched it onto a series of diamond substrates. The grating parameters were measured by means of scanning electron microscopy. The resulting components were then tested on a mid-infrared coronagraphic test bench. A broadband raw null depth of 2 x 10^{-3} was obtained for our best L-band AGPM after only a few iterations between design and manufacturing. This corresponds to a raw contrast of about 6 x 10^{-5} (10.5 mag) at 2lambda/D. This result is fully in line with our projections based on rigorous coupled wave analysis modeling, using the measured grating parameters. The sensitivity to tilt and focus has also been evaluated. After years of technological developments, mid-infrared vector vortex coronagraphs finally become a reality and live up to our expectations. Based on their measured performance, our L-band AGPMs are now ready to open a new parameter space in exoplanet imaging at major ground-based observatories.
