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Annular Groove Phase Mask coronagraph in diamond for mid-IR wavelengths: manufacturing assessment and performance analysis

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 نشر من قبل Christian Delacroix
 تاريخ النشر 2014
  مجال البحث فيزياء
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Phase-mask coronagraphs are known to provide high contrast imaging capabilities while preserving a small inner working angle, which allows searching for exoplanets or circumstellar disks with smaller telescopes or at longer wavelengths. The AGPM (Annular Groove Phase Mask, Mawet et al. 2005) is an optical vectorial vortex coronagraph (or vector vortex) induced by a rotationally symmetric subwavelength grating (i.e. with a period smaller than {lambda}/n, {lambda} being the observed wavelength and n the refractive index of the grating substrate). In this paper, we present our first mid- infrared AGPM prototypes imprinted on a diamond substrate. We firstly give an extrapolation of the expected coronagraph performances in the N-band (~10 {mu}m), and prospects for down-scaling the technology to the most wanted L- band (~3.5 {mu}m). We then present the manufacturing and measurement results, using diamond-optimized microfabrication techniques such as nano-imprint lithography (NIL) and reactive ion etching (RIE). Finally, the subwavelength grating profile metrology combines surface metrology (scanning electron microscopy, atomic force microscopy, white light interferometry) with diffractometry on an optical polarimetric bench and cross correlation with theoretical simulations using rigorous coupled wave analysis (RCWA).

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Context. The Annular Groove Phase Mask (AGPM) is one possible implementation of the vector vortex coronagraph, where the helical phase ramp is produced by a concentric subwavelength grating. For several years, we have been manufacturing AGPMs by etch ing gratings into synthetic diamond substrates using inductively coupled plasma etching. Aims. We aim to design, fabricate, optimize, and evaluate new L-band AGPMs that reach the highest possible coronagraphic performance, for applications in current and forthcoming infrared high-contrast imagers. Methods. Rigorous coupled wave analysis (RCWA) is used for designing the subwavelength grating of the phase mask. Coronagraphic performance evaluation is performed on a dedicated optical test bench. The experimental results of the performance evaluation are then used to accurately determine the actual profile of the fabricated gratings, based on RCWA modeling. Results. The AGPM coronagraphic performance is very sensitive to small errors in etch depth and grating profile. Most of the fabricated components therefore show moderate performance in terms of starlight rejection (a few 100:1 in the best cases). Here we present new processes for re-etching the fabricated components in order to optimize the parameters of the grating and hence significantly increase their coronagraphic performance. Starlight rejection up to 1000:1 is demonstrated in a broadband L filter on the coronagraphic test bench, which corresponds to a raw contrast of about 1e-5 at two resolution elements from the star for a perfect input wave front on a circular, unobstructed aperture. Conclusions. Thanks to their exquisite performance, our latest L-band AGPMs are good candidates for installation in state-of-the-art and future high-contrast thermal infrared imagers, such as METIS for the E-ELT.
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