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Improving spatial resolution of scanning SQUID microscopy with an on-chip design

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 Added by Yihua Wang
 Publication date 2021
  fields Physics
and research's language is English




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Scanning superconducting quantum interference device microscopy (sSQUID) is currently one of the most effective methods for direct and sensitive magnetic flux imaging on the mesoscopic scale. A SQUID-on-chip design allows integration of field coils for susceptometry in a gradiometer setup which is very desirable for measuring magnetic responses of quantum matter. However, the spatial resolution of such a design has largely been limited to micrometers due to the difficulty in approaching the sample. Here, we used electron beam lithography technology in the fabrication of the 3D nano-bridge-based SQUID devices to prepare pick-up coils with diameters down to 150 nm. Furthermore, we integrated the deep silicon etching process in order to minimize the distance between the pick-up coil and the wafer edge. Combined with a tuning-fork-based scanning head, the sharpness of the etched chip edge enables a precision of 5 nm in height control. By scanning measurements on niobium chessboard samples using these improved SQUID devices, we demonstrate sub-micron spatial resolutions in both magnetometry and susceptometry, significantly better than our previous generations of nano-SQUIDs. Such improvement in spatial resolution of SQUID-on-chip is a valuable progress for magnetic imaging of quantum materials and devices in various modes.



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Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of $approx 2muPhi_0/Hz^{1/2}$. This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.
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Precise detection of spin resonance is of paramount importance to achieve coherent spin control in quantum computing. We present a novel setup for spin resonance measurements, which uses a dc-SQUID flux detector coupled to an antenna from a coplanar waveguide. The SQUID and the waveguide are fabricated from 20~nm Nb thin film, allowing high magnetic field operation with the field applied parallel to the chip. We observe a resonance signal between the first and third excited states of Gd spins $S=7/2$ in a CaWO$_4$ crystal, relevant for state control in multi-level systems.
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