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Register a new userScanning SQUID susceptometers with sub-micron spatial resolution
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Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of $approx 2muPhi_0/Hz^{1/2}$. This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.
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The diamagnetic susceptibility of a superconductor is directly related to its superfluid density. Mutual inductance is a highly sensitive method for characterizing thin films; however, in traditional mutual inductance measurements, the measured response is a non-trivial average over the area of the mutual inductance coils, which are typically of millimeter size. Here we image localized, isolated features in the diamagnetic susceptibility of {delta}-doped SrTiO3, the 2-DES at the interface between LaAlO3 and SrTiO3, and Nb superconducting thin film systems using scanning superconducting quantum interference device susceptometry, with spatial resolution as fine as 0.7 {mu}m. We show that these features can be modeled as locally suppressed superfluid density, with a single parameter that characterizes the strength of each feature. This method provides a systematic means of finding and quantifying submicron defects in two-dimensional superconductors.
Scanning superconducting quantum interference device microscopy (sSQUID) is currently one of the most effective methods for direct and sensitive magnetic flux imaging on the mesoscopic scale. A SQUID-on-chip design allows integration of field coils for susceptometry in a gradiometer setup which is very desirable for measuring magnetic responses of quantum matter. However, the spatial resolution of such a design has largely been limited to micrometers due to the difficulty in approaching the sample. Here, we used electron beam lithography technology in the fabrication of the 3D nano-bridge-based SQUID devices to prepare pick-up coils with diameters down to 150 nm. Furthermore, we integrated the deep silicon etching process in order to minimize the distance between the pick-up coil and the wafer edge. Combined with a tuning-fork-based scanning head, the sharpness of the etched chip edge enables a precision of 5 nm in height control. By scanning measurements on niobium chessboard samples using these improved SQUID devices, we demonstrate sub-micron spatial resolutions in both magnetometry and susceptometry, significantly better than our previous generations of nano-SQUIDs. Such improvement in spatial resolution of SQUID-on-chip is a valuable progress for magnetic imaging of quantum materials and devices in various modes.
Scanning Superconducting Quantum Interference Device (SQUID) Susceptometry simultaneously images the local magnetic fields and susceptibilities above a sample with sub-micron spatial resolution. Further development of this technique requires a thorough understanding of the current, voltage, and flux characteristics of scanning SQUID susceptometers. These sensors often have striking anomalies in their current-voltage characteristics, which we believe to be due to electromagnetic resonances. The effect of these resonances on the performance of these SQUIDs is unknown. To explore the origin and impact of the resonances, we have developed a model that qualitatively reproduces the experimentally-determined current-voltage characteristics of our scanning SQUID susceptometers. We use this model to calculate the noise characteristics of SQUIDs of different designs. We find that the calculated ultimate flux noise is better in susceptometers with damping resistors that diminish the resonances than susceptometers without damping resistors. Such calculations will enable the optimization of the signal-to-noise characteristics of scanning SQUID susceptometers.
One of the critical milestones in the intensive pursuit of quantitative nanoscale magnetic imaging tools is achieving the level of sensitivity required for detecting the field generated by the spin magnetic moment {mu}B of a single electron. Superconducting quantum interference devices (SQUIDs), which were traditionally the most sensitive magnetometers, could not hitherto reach this goal because of their relatively large effective size (of the order of 1 {mu}m). Here we report self-aligned fabrication of nano-SQUIDs with diameters as small as 46 nm and with an extremely low flux noise of 50 n{Phi}0/Hz^1/2, representing almost two orders of magnitude improvement in spin sensitivity, down to 0.38 {mu}B/Hz^1/2. In addition, the devices operate over a wide range of magnetic fields with 0.6 {mu}B/Hz^1/2 sensitivity even at 1 T. We demonstrate magnetic imaging of vortices in type II superconductor that are 120 nm apart and scanning measurements of AC magnetic fields down to 50 nT. The unique geometry of these nano-SQUIDs that reside on the apex of a sharp tip allows approaching the sample to within a few nm, which paves the way to a new class of single-spin resolved scanning probe microscopy.
We designed and fabricated a new type of superconducting quantum interference device (SQUID) susceptometers for magnetic imaging of quantum materials. The 2-junction SQUID sensors employ 3D Nb nano-bridges fabricated using electron beam lithography. The two counter-wound balanced pickup loops of the SQUID enable gradiometric measurement and they are surrounded by a one-turn field coil for susceptibility measurements. The smallest pickup loop of the SQUIDs were 1 ${mu}m$ in diameter and the flux noise was around 1 $mu{Phi}_0/sqrt{Hz}$ at 100 Hz. We demonstrate scanning magnetometry, susceptometry and current magnetometry on some test samples using these nano-SQUIDs.
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