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Register a new userVersatile Direct Writing of Dopants in a Solid State Host Through Recoil Implantation
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Modifying material properties at the nanoscale is crucially important for devices in nanoelectronics, nanophotonics and quantum information. Optically active defects in wide band gap materials, for instance, are vital constituents for the realisation of quantum technologies. Yet, the introduction of atomic defects through direct ion implantation remains a fundamental challenge. Herein, we establish a universal method for material doping by exploiting one of the most fundamental principles of physics - momentum transfer. As a proof of concept, we direct-write arrays of emitters into diamond via momentum transfer from a Xe+ focused ion beam (FIB) to thin films of the group IV dopants pre-deposited onto a diamond surface. We conclusively show that the technique, which we term knock-on doping, can yield ultra-shallow dopant profiles localized to the top 5 nm of the target surface, and use it to achieve sub-50 nm lateral resolution. The knock-on doping method is cost-effective, yet very versatile, powerful and universally suitable for applications such as electronic and magnetic doping of atomically thin materials and engineering of near-surface states of semiconductor devices.
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A novel technique is reported to improve the resolution of two-photon direct laser writing lithography. Thanks to the high collimation enabled by extraordinary $varepsilon_{NZ}$ (near-zero) metamaterial features, ultra-thin dielectric hyper resolute nanostructures are within reach. With respect to the standard direct laser writing approach, a size reduction of $89%$ and $50%$ , in height and width respectively, is achieved with the height of the structures adjustable between 5nm and 50nm. The retrieved 2D fabrication parameters are exploited for fabricating hyper resolute 3D structures. In particular, a highly detailed dielectric bas-relief (500 nm of full height) of Da Vincis textit{Lady with an Ermine} has been realized. The proof-of-concept result shows intriguing cues for the current and trendsetting research scenario in anti-counterfeiting applications, flat optics and photonics.
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