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Register a new userParticle dynamics in deposition of porous films with a pulsed radio-frequency atmospheric pressure glow discharge
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Nanoparticles grown in a plasma are used to visualize the process of film deposition in a pulsed radio-frequency (rf) atmospheric pressure glow discharge. Modulating the plasma makes it possible to successfully prepare porous TiO2 films. We study the trapping of the particles in the sheath during the plasma-on phase and compare it with numerical simulations. During the plasma-off phase, the particles are driven to the substrate by the electric field generated by residual ions, leading to the formation of porous TiO2 film. Using video microscopy, the collective dynamics of particles in the whole process is revealed at the most fundamental kinetic level.
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A two-dimensional fluid model is used to investigate the electron heating dynamics and the production of neutral species in a capacitively coupled radio-frequency micro atmospheric pressure helium plasma jet -- specifically the COST jet -- with a small oxygen admixture. Electron heating mode transitions are found to be induced by varying the driving voltage amplitude and the O$_2$ concentration numerically and experimentally. The helium metastable density, and the charged species densities are highly relevant to the electron heating dynamics. By analyzing the creation and destruction mechanisms of the negative ions, we find that the generation of negative ions strongly depends on the O$_2$ concentration. The increase of the electronegativity with the increasing O$_2$ concentration leads to an enhancement of the bulk drift electric field. The distributions of the different neutral species densities along the direction of the gas flow inside the jet, as well as in the effluent differ a lot due to the relevant chemical reaction rates and the effect of the gas flow. The simulated results show that a fluid model can be an effective tool for qualitative investigations of micro atmospheric pressure plasma jets.
The deposition of thin SiO$_x$C$_y$H$_z$ or SiO$_x$H$_y$ films by means of atmospheric pressure microplasma jets with admixture of Hexamethyldisiloxane (HMDSO) and oxygen and the role of surface reactions in film growth are investigated. Two types of microplasma jets, one with a planar electrodes and operated in helium gas and the other one with a coaxial geometry operated in argon, are used to study the deposition process. The growth rate of the film and the carbon-content in the film are measured as a function of the O$_2$ and HMDSO admixture in the planar jet and are compared to mass spectrometry measurements of the consumption of HMDSO. Additionally, the localized nature of the jet-substrate interaction is utilized to study surface reactions by applying two jets on a rotating substrate. The addition of oxygen into the gas mixture increases HMDSO depletion and the growth rate and results in the deposition of carbon free films. The surface reaction is responsible for the carbon removal from the growing film. Moreover, carbon free films can be deposited even without addition of oxygen, when coaxial jet operated with argon is used for the surface treatment. We hypothesize that ions or excited species (metastables) could be responsible for the observed effect.
In this work, we present an experimental study of nanosecond high-voltage discharges in a pin-to-pin electrode configuration at atmospheric conditions operating in single-pulse mode (no memory effects). Various discharge parameters, including voltage, current, gas density, rotational/vibrational/gas temperature, and electron number density, were measured. Several different measurement techniques were used, including microwave Rayleigh scattering, laser Rayleigh scattering, optical emission spectroscopy enhanced with a nanosecond probing pulse, fast photography, and electrical parameter measurements. Spark and corona discharge regimes were studied with discharge pulse duration of 90 ns and electrode gap sizes ranging from 2 to 10 mm. The spark regime was observed for gaps < 6 mm using discharge pulse energies of 0.6-1 mJ per mm of the gap length. Higher electron number densities, total electron number per gap length, discharge currents, and gas temperatures were observed for smaller electrode gaps and larger pulse energies, reaching maximal values of about 7.5x10^15 cm-3, 3.5x10^11 electrons per mm, 22 A, and 4,000 K (at 10 us after the discharge), respectively, for a 2 mm gap and 1 mJ/mm discharge pulse energy. Initial breakdown was followed by a secondary breakdown occurring about 30-70 ns later and was associated with ignition of a cathode spot and transition of the discharge to cathodic arc. A majority of the discharge pulse energy was deposited into the gas before the secondary breakdown (85-89%). The electron number density after the ns discharge pulse decayed with a characteristic time scale of 150 ns governed by dissociative recombination and electron attachment to oxygen mechanisms. For the corona regime, substantially lower pulse energies (~0.1 mJ/mm), peak conduction current (1-2 A), and electron numbers (3-5x10^10 electrons per mm), and gas temperatures (360 K) were observed.
The electron sheath formation in a DC magnetised plasma of modified hollow cathode source is studied. The discharge consists of two plane parallel cathodes and a small cubical anode placed off axis at the center. The argon plasma is produced and the properties of the plasma in response to the sheath formation near the anode are studied using electrical and optical diagnostics. In particular, the effect of pressure, magnetic field on discharge parameters such as discharge current, plasma potential, plasma density and electron temperature is studied. The discharge showed an onset of anode glow at a critical applied magnetic field indicating the formation of electron sheath and a double layer. The discharge current initially decreases; however it starts to rise again as the anode spot appears on the anode. The critical magnetic field at which anode glow formation takes place is dependent upon operating pressure and discharge voltage. The transition from ion sheath to electron sheath is investigated in detail by Langmuir probe and spectroscopy diagnostics. The plasma potential near the anode decreases during the transition from ion sheath to electron sheath. The plasma potential locks to the ionization potential of argon gas when anode spot is completely formed. A systematic study showed that during the transition, the electron temperature increases and plasma density decreases in the bulk plasma. The spectroscopy of the discharge showed presence of strong atomic and ionic lines of argon. The intensity of these spectral lines showed a dip during the transition between two sheaths. After the formation of the anode spot, oscillations of the order of 5-20 kHz are observed in the discharge current and floating potential due to the enhanced ionisation and excitation processes in the electron sheath.
We employ the approximation of overlapped scattering potentials of charged dust particles exposed to streaming ions to deduce the equation of state for a stationary dust cloud in the radio frequency discharge apart from the void dust boundary. The obtained equation defines the potential of a dust particle as a function of the ion number density, the mass of a carrier gas atom, and the electron temperature. A scaling law that relates the particle number density to the particle radius and electron temperature in different systems is formulated. Based on the proposed approach the radius of a cavity around a large particle in the bulk of a cloud is estimated. The results of calculation are in a reasonable agreement with the experimental data available in literature.
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