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Scanning nano-SQUID with single electron spin sensitivity

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 Added by Denis Vasyukov
 Publication date 2013
  fields Physics
and research's language is English




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One of the critical milestones in the intensive pursuit of quantitative nanoscale magnetic imaging tools is achieving the level of sensitivity required for detecting the field generated by the spin magnetic moment {mu}B of a single electron. Superconducting quantum interference devices (SQUIDs), which were traditionally the most sensitive magnetometers, could not hitherto reach this goal because of their relatively large effective size (of the order of 1 {mu}m). Here we report self-aligned fabrication of nano-SQUIDs with diameters as small as 46 nm and with an extremely low flux noise of 50 n{Phi}0/Hz^1/2, representing almost two orders of magnitude improvement in spin sensitivity, down to 0.38 {mu}B/Hz^1/2. In addition, the devices operate over a wide range of magnetic fields with 0.6 {mu}B/Hz^1/2 sensitivity even at 1 T. We demonstrate magnetic imaging of vortices in type II superconductor that are 120 nm apart and scanning measurements of AC magnetic fields down to 50 nT. The unique geometry of these nano-SQUIDs that reside on the apex of a sharp tip allows approaching the sample to within a few nm, which paves the way to a new class of single-spin resolved scanning probe microscopy.



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Superconducting QUantum Interference Device (SQUID) microscopy has excellent magnetic field sensitivity, but suffers from modest spatial resolution when compared with other scanning probes. This spatial resolution is determined by both the size of the field sensitive area and the spacing between this area and the sample surface. In this paper we describe scanning SQUID susceptometers that achieve sub-micron spatial resolution while retaining a white noise floor flux sensitivity of $approx 2muPhi_0/Hz^{1/2}$. This high spatial resolution is accomplished by deep sub-micron feature sizes, well shielded pickup loops fabricated using a planarized process, and a deep etch step that minimizes the spacing between the sample surface and the SQUID pickup loop. We describe the design, modeling, fabrication, and testing of these sensors. Although sub-micron spatial resolution has been achieved previously in scanning SQUID sensors, our sensors not only achieve high spatial resolution, but also have integrated modulation coils for flux feedback, integrated field coils for susceptibility measurements, and batch processing. They are therefore a generally applicable tool for imaging sample magnetization, currents, and susceptibilities with higher spatial resolution than previous susceptometers.
Scanning Superconducting QUantum Interference Device (SQUID) microscopy is a powerful tool for imaging local magnetic properties of materials and devices, but it requires a low-vibration cryogenic environment, traditionally achieved by thermal contact with a bath of liquid helium or the mixing chamber of a wet dilution refrigerator. We mount a SQUID microscope on the 3 K plate of a Bluefors cryocooler and characterize its vibration spectrum by measuring SQUID noise in a region of sharp flux gradient. By implementing passive vibration isolation, we reduce relative sensor-sample vibrations to 20 nm in-plane and 15 nm out-of-plane. A variable-temperature sample stage that is thermally isolated from the SQUID sensor enables measurement at sample temperatures from 2.8 K to 110 K. We demonstrate these advances by imaging inhomogeneous diamagnetic susceptibility and vortex pinning in optimally-doped YBCO above 90 K.
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Scanning nanoscale superconducting quantum interference devices (nanoSQUIDs) are of growing interest for highly sensitive quantitative imaging of magnetic, spintronic, and transport properties of low-dimensional systems. Utilizing specifically designed grooved quartz capillaries pulled into a sharp pipette, we have fabricated the smallest SQUID-on-tip (SOT) devices with effective diameters down to 39 nm. Integration of a resistive shunt in close proximity to the pipette apex combined with self-aligned deposition of In and Sn, have resulted in SOT with a flux noise of 42 n$Phi_0$Hz$^{-1/2}$, yielding a record low spin noise of 0.29 $mu_B$Hz$^{-1/2}$. In addition, the new SOTs function at sub-Kelvin temperatures and in high magnetic fields of over 2.5 T. Integrating the SOTs into a scanning probe microscope allowed us to image the stray field of a single Fe$_3$O$_4$ nanocube at 300 mK. Our results show that the easy magnetization axis direction undergoes a transition from the (111) direction at room temperature to an in-plane orientation, which could be attributed to the Verwey phase transition in Fe$_3$O$_4$.
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