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Register a new userIntegrated high frequency aluminum nitride optomechanical resonators
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Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2times10^(-18)m/Hz^(1/2) in ambient air.
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We describe the measurement and modeling of amplitude noise and phase noise in ultra-high Q nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators noise performance is studied with high precision. We find that the amplitude noise can be well described by the thermomechanical model, however, the resonators exhibit sizable extra phase noise due to their intrinsic frequency fluctuations. We develop a method to extract the resonator frequency fluctuation of a driven resonator and obtain a noise spectrum with dependence, which could be attributed to defect motion with broadly distributed relaxation times.
We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3 MHz, 1.04 GHz, and 3.12 GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum.
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a lumped element circuit. Despite a low cavity quality factor (Q$_mathrm{E}approx$ 7.4) and off resonant, room temperature operation, we are able to parametrize several mechanical modes and estimate their optomechanical coupling strengths. This enables real-time measurements of the membranes driven motion and fast characterization without requiring a superconducting cavity, thereby eliminating the need for cryogenic cooling. Finally, we observe optomechanically induced transparency and absorption, crucial for a number of applications including sensitive metrology, ground state cooling of mechanical motion and slowing of light.
Vibrating nano- and micromechanical resonators have been the subject of research aiming at ultrasensitive mass sensors for mass spectrometry, chemical analysis and biomedical diagnosis. Unfortunately, their merits diminish dramatically in liquids due to dissipative mechanisms like viscosity and acoustic losses. A push towards faster and lighter miniaturized nanodevices would enable improved performances, provided dissipation was controlled and novel techniques were available to efficiently drive and read-out their minute displacement. Here we report on a nano-optomechanical approach to this problem using miniature semiconductor disks. These devices combine mechanical motion at high frequency above the GHz, ultra-low mass of a few picograms, and moderate dissipation in liquids. We show that high-sensitivity optical measurements allow to direct resolve their thermally driven Brownian vibrations, even in the most dissipative liquids. Thanks to this novel technique, we experimentally, numerically and analytically investigate the interaction of these resonators with arbitrary liquids. Nano-optomechanical disks emerge as probes of rheological information of unprecedented sensitivity and speed, opening applications in sensing and fundamental science.
We report on optomechanical GaAs disk resonators with ultrahigh quality factor - frequency product Qf. Disks standing on a simple pedestal exhibit GHz breathing modes attaining a Qf of 10^13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation in this configuration. A new type of disk resonator integrating a shield within the pedestal is then proposed and its working principles and performances investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss-limited Q reaches 10^7-10^9 corresponding to Qf of 10^16-10^18. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.
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