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Register a new userCavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators
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We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3 MHz, 1.04 GHz, and 3.12 GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum.
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Resonant photoelastic coupling in semiconductor nanostructures opens new perspectives for strongly enhanced light-sound interaction in optomechanical resonators. One potential problem, however, is the reduction of the cavity Q-factor induced by dissipation when the resonance is approached. We show in this letter that cavity-polariton mediation in the light-matter process overcomes this limitation allowing for a strongly enhanced photon-phonon coupling without significant lifetime reduction in the strongly-coupled regime. Huge optomechanical coupling factors in the PetaHz/nm range are envisaged, three orders of magnitude larger than the backaction produced by the mechanical displacement of the cavity mirrors.
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2times10^(-18)m/Hz^(1/2) in ambient air.
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