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Register a new userCharacterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror
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In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuators stroke-voltage relationship and the effect of the non- additivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.
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In the framework of the GLARE-X (Geodesy via LAser Ranging from spacE X) project, led by INFN and funded for the years 2019-2021, aiming at significantly advance space geodesy, one shows the initial activities carried out in 2019 in order to manufacture and test adaptive mirrors. This specific article deals with manufacturing and surface quality measurements of the passive substrate of candidate MEMS (Micro-Electro-Mechanical Systems) mirrors for MRRs (Modulated RetroReflectors); further publications will show the active components. The project GLARE-X was approved by INFN for the years 2019-2021: it involves several institutions, including, amongst the other, INFN-LNF and FBK. GLARE-X is an innovative R&D activity, whose at large space geodesy goals will concern the following topics: inverse laser ranging (from a laser terminal in space down to a target on a planet), laser ranging for debris removal and iterative orbit correction, development of high-end ToF (Time of Flight) electronics, manufacturing and testing of MRRs for space, and provision of microreflectors for future NEO (Near Earth Orbit) cubesats. This specific article summarizes the manufacturing and surface quality measurements activities performed on the passive substrate of candidate MEMS mirrors, which will be in turn arranged into MRRs. The final active components, to be realized by 2021, will inherit the manufacturing characteristics chosen thanks to the presented (and further) testing campaigns, and will find suitable space application to NEO, Moon, and Mars devices, like, for example, cooperative and active lidar scatterers for laser altimetry and lasercomm support.
We have built a 45-cm long x-ray deformable mirror of super-polished single-crystal silicon that has 45 actuators along the tangential axis. After assembly the surface height error was 19 nm rms. With use of high-precision visible-light metrology and precise control algorithms, we have actuated the x-ray deformable mirror and flattened its entire surface to 0.7 nm rms controllable figure error. This is, to our knowledge, the first sub-nanometer active flattening of a substrate longer than 15 cm.
The Very Large Telescope Interferometer Auxiliary Telescopes will soon be equipped with an adaptive optics system called NAOMI. The corrective optics deformable mirror is the commercial DM241 from ALPAO. Being part of an interferometer operating from visible to mid-infrared, the DMs of NAOMI face several challenges (high level of reliability, open-loop chopping, piston-free control, WFS/DM pupil rotation, high desired bandwidth and stroke). We here describe our extensive characterization of the DMs through measurements and simulations. We summarize the operational scenario we have defined to handle the specific mirror properties. We conclude that the ALPAO DMs have overall excellent properties that fulfill most of the stringent requirements and that deviations from specifications are easily handled. To our knowledge, NAOMI will be the first astronomical system with a command in true Zernike modes (allowing software rotation), and the first astronomical system in which a chopping is performed with the deformable mirror (5 sky, at 5~Hz).
MOEMS Deformable Mirrors (DM) are key components for next generation instruments with innovative adaptive optics systems, in existing telescopes and in the future ELTs. These DMs must perform at room temperature as well as in cryogenic and vacuum environment. Ideally, the MOEMS-DMs must be designed to operate in such environment. We present some major rules for designing / operating DMs in cryo and vacuum. We chose to use interferometry for the full characterization of these devices, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. Thanks to our previous set-up developments, we placed a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom Michelson interferometer, able to measure performances of the DM at actuator/segment level as well as whole mirror level, with a lateral resolution of 2{mu}m and a sub-nanometric z-resolution. Using this interferometric bench, we tested the Iris AO PTT111 DM: this unique and robust design uses an array of single crystalline silicon hexagonal mirrors with a pitch of 606{mu}m, able to move in tip, tilt and piston with strokes from 5 to 7{mu}m, and tilt angle in the range of +/-5mrad. They exhibit typically an open-loop flat surface figure as good as <20nm rms. A specific mount including electronic and opto-mechanical interfaces has been designed for fitting in the test chamber. Segment deformation, mirror shaping, open-loop operation are tested at room and cryo temperature and results are compared. The device could be operated successfully at 160K. An additional, mainly focus-like, 500 nm deformation is measured at 160K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on some segments. Tests on DM with different mirror thicknesses (25{mu}m and 50{mu}m) and different coatings (silver and gold) are currently under way.
Long-term stability of deformable mirrors (DM) is a critical performance requirement for instruments requiring open-loop corrections. The effects of temperature changes in the DM performance are equally critical for such instruments. This paper investigates the long-term stability of three different Iris AO PTT111 DMs that were calibrated at different times ranging from 13 months to nearly 29 months prior to subsequent testing. Performance testing showed that only a small increase in positioning errors occurred from the initial calibration date to the test dates. The increases in errors ranged from as little as 1.38 nm rms after 18 months to 5.68 nm rms after 29 months. The paper also studies the effects of small temperature changes, up to 6.2{deg}C around room temperature. For three different arrays, the errors ranged from 0.62-1.42 nm rms/{deg}C. Removing the effects of packaging shows that errors are $le$0.50 nm rms/{deg}C. Finally, measured data showed that individual segments deformed $le$0.11 nm rms/{deg}C when heated.
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