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Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.
In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (< 1$mu$m) platforms, are highly relevant for nanoscale sensing
Random lasers use radiative gain and multiple scatterers in disordered media to generate light amplification. In this study, we demonstrate a random laser based on diamond nanoneedles that act as scatterers in combination with fluorescent dye molecul
The properties of the square array of coupled Microring Resonators (MRRs) with interstitial rings are studied. Dispersion behavior of the interstitial square coupled MRRs is obtained through the transfer matrix method with the Floquet-Bloch periodic
Optical whispering-gallery microresonators are useful tools in microphotonics, and nonlinear optics at very low threshold powers. Here, we present details about the fabrication of ultra-high-Q whispering-gallery-mode resonators made by CO2-laser lath
We demonstrate wheel-shaped silicon optomechanical resonators for resonant operation in ambient air. The high finesse of optical whispering gallery modes (loaded optical Q factor above 500,000) allows for efficient transduction of the wheel resonator