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Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the pressure and sheath correction process by sweeping over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module (HPEM) simulations and show good agreement.
The collision frequencies of electron-neutral-particle in the weakly ionized complex plasmas with the non-Maxwellian velocity distributions are studied. The average collision frequencies of electron-neutral-particle in the plasmas are derived accurat
We study the collision frequency of electron-neutral-particle in the weakly ionized plasma with the power-law velocity q-distribution and derive the formulation of the average collision frequency. We find that the average collision frequency in the q
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance freque
In the recent years, the hydrofluoroolefine HFO1234ze(E) (C3H2F4) has been subject to a growing interest for refrigerant applications. This novel gas is also considered a promising alternative in gaseous particle detectors and gaseous voltage insulat
A new type of laser photodetachment (LPD) technique has been developed for the measurement of electron sheath thickness around an electrostatic probe and for the measurement of the length of collection region of photodetached electrons (PDE). When a