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Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

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 نشر من قبل Savio Fabretti
 تاريخ النشر 2010
  مجال البحث فيزياء
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We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450{deg}C and 750{deg}C. We will show that the substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of 27.1K for a film thickness of 30nm. The crystal structures were measured by x-ray diffraction.

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