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تسجيل مستخدم جديدMicro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
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EDA Publishing Association
تاريخ النشر
2008
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الهندسة المعلوماتية
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This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on low cost specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
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