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In epitaxially strained ferroelectric thin films and superlattices, the ferroelectric transition temperature can lie above the growth temperature. Ferroelectric polarization and domains should then evolve during the growth of a sample, and electrosta tic boundary conditions may play an important role. In this work, ferroelectric domains, surface termination, average lattice parameter and bilayer thickness are simultaneously monitored using in-situ synchrotron x-ray diffraction during the growth of BaTiO$_3$/SrTiO$_3$ superlattices on SrTiO$_3$ substrates by off-axis RF magnetron sputtering. The technique used allows for scan times substantially faster than the growth of a single layer of material. Effects of electric boundary conditions are investigated by growing the same superlattice alternatively on SrTiO$_3$ substrates and 20nm SrRuO$_3$ thin films on SrTiO$_3$ substrates. These experiments provide important insights into the formation and evolution of ferroelectric domains when the sample is ferroelectric during the growth process.
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