Sensitivity of micromechanical actuation on amorphous to crystalline phase transformations under the influence of Casimir forces

Amorphous to crystalline phase transitions in phase change materials (PCM) can have strong influence on the actuation of microelectromechanical systems under the influence of Casimir forces. Indeed, the bifurcation curves of the stationary equilibrium points and the corresponding phase portraits of the actuation dynamics between gold and AIST PCM, where an increase of the Casimir force of up ~25% has been measured upon crystallization, show strong sensitivity to changes of the Casimir force as the stiffness of the actuating component decreases and/or the effective interaction area of the Casimir force increases, which can also lead to stiction. However, introduction of intrinsic energy dissipation (associated with a finite quality factor of the actuating system) can prevent stiction by driving the system to attenuated motion towards stable equilibrium depending on the PCM state and the system quality factor.

Switching Casimir forces with Phase Change Materials

We demonstrate here a controllable variation in the Casimir force. Changes in the force of up to 20% at separations of ~100 nm between Au and AgInSbTe (AIST) surfaces were achieved upon crystallization of an amorphous sample of AIST. This material is well known for its structural transformation, which produces a significant change in the optical properties and is exploited in optical data storage systems. The finding paves the way to the control of forces in nanosystems, such as micro- or nanoswitches by stimulating the phase change transition via localized heat sources.