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Simplified Josephson-junction fabrication process for reproducibly high-performance superconducting qubits

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 Added by Amr Osman
 Publication date 2020
  fields Physics
and research's language is English




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We introduce a simplified fabrication technique for Josephson junctions and demonstrate superconducting Xmon qubits with $T_1$ relaxation times averaging above 50$~mu$s ($Q>$1.5$times$ 10$^6$). Current shadow-evaporation techniques for aluminum-based Josephson junctions require a separate lithography step to deposit a patch that makes a galvanic, superconducting connection between the junction electrodes and the circuit wiring layer. The patch connection eliminates parasitic junctions, which otherwise contribute significantly to dielectric loss. In our patch-integrated cross-type (PICT) junction technique, we use one lithography step and one vacuum cycle to evaporate both the junction electrodes and the patch. In a study of more than 3600 junctions, we show an average resistance variation of 3.7$%$ on a wafer that contains forty 0.5$times$0.5-cm$^2$ chips, with junction areas ranging between 0.01 and 0.16 $mu$m$^2$. The average on-chip spread in resistance is 2.7$%$, with 20 chips varying between 1.4 and 2$%$. For the junction sizes used for transmon qubits, we deduce a wafer-level transition-frequency variation of 1.7-2.5$%$. We show that 60-70$%$ of this variation is attributed to junction-area fluctuations, while the rest is caused by tunnel-junction inhomogeneity. Such high frequency predictability is a requirement for scaling-up the number of qubits in a quantum computer.



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Although Josephson junction qubits show great promise for quantum computing, the origin of dominant decoherence mechanisms remains unknown. We report Rabi oscillations for an improved phase qubit, and show that their coherence amplitude is significantly degraded by spurious microwave resonators. These resonators arise from changes in the junction critical current produced by two-level states in the tunnel barrier. The discovery of these high frequency resonators impacts the future of all Josephson qubits as well as existing Josephson technologies. We predict that removing or reducing these resonators through materials research will improve the coherence of all Josephson qubits.
Two basic physical models, a two-level system and a harmonic oscillator, are realized on the mesoscopic scale as coupled qubit and resonator. The realistic system includes moreover the electronics for controlling the distance between the qubit energy levels and their populations and to read out the resonators state, as well as the unavoidable dissipative environment. Such rich system is interesting both for the study of fundamental quantum phenomena on the mesoscopic scale and as a promising system for future electronic devices. We present recent results for the driven superconducting qubit-resonator system, where the resonator can be realized as an LC circuit or a nanomechanical resonator. Most of the results can be described by the semiclassical theory, where a qubit is treated as a quantum two-level system coupled to the classical driving field and the classical resonator. Application of this theory allows to describe many phenomena for the single and two coupled superconducting qubits, among which are the following: the equilibrium-state and weak-driving spectroscopy, Sisyphus damping and amplification, Landau-Zener-Stuckelberg interferometry, the multiphoton transitions of both direct and ladder- type character, and creation of the inverse population for lasing.
In this work, we briefly overview various options for Josephson junctions which should be scalable down to nanometer range for utilization in nanoscale digital superconducting technology. Such junctions should possess high values of critical current, $I_c$, and normal state resistance, $R_n$. Another requirement is the high reproducibility of the junction parameters across a wafer in a fabrication process. We argue that Superconductor - Normal metal - Superconductor (SN-N-NS) Josephson junction of variable thickness bridge geometry is a promising choice to meet these requirements. Theoretical analysis of SN-N-NS junction is performed in the case where the distance between the S-electrodes is comparable to the coherence length of the N-material. The restriction on the junction geometrical parameters providing the existence of superconductivity in the S-electrodes is derived for the current flowing through the junction of an order of $I_c$. The junction heating, as well as available mechanisms for the heat removal, is analyzed. The obtained results show that an SN-N-NS junction with a high (sub-millivolt) value of $I_cR_n$ product can be fabricated from a broadly utilized combination of materials like Nb/Cu using well-established technological processes. The junction area can be scaled down to that of semiconductor transistors fabricated in the frame of a 40-nm process.
We have measured the excited state lifetimes in Josephson junction phase and transmon qubits, all of which were fabricated with the same scalable multi-layer process. We have compared the lifetimes of phase qubits before and after removal of the isolating dielectric, SiNx, and find a four-fold improvement of the relaxation time after the removal. Together with the results from the transmon qubit and measurements on coplanar waveguide resonators, these measurements indicate that the lifetimes are limited by losses from the dielectric constituents of the qubits. We have extracted the individual loss contributions from the dielectrics in the tunnel junction barrier, AlOx, the isolating dielectric, SiNx, and the substrate, Si/SiO2, by weighing the total loss with the parts of electric field over the different dielectric materials. Our results agree well and complement the findings from other studies, demonstrating that superconducting qubits can be used as a reliable tool for high-frequency characterization of dielectric materials. We conclude with a discussion of how changes in design and material choice could improve qubit lifetimes up to a factor of four.
We demonstrate Josephson junction based double-balanced mixer and phase shifter circuits operating at 6-10 GHz, and integrate these components to implement both a monolithic amplitude/phase vector modulator and a quadrature mixer. The devices are actuated by flux signals, dissipate no power on chip, exhibit input saturation powers in excess of 1 nW, and provide cryogenic microwave modulation solutions for integrated control of superconducting qubits.
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