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The Limits of Resolution and Dose for Aberration-Corrected Electron Tomography

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 Added by Reed Yalisove
 Publication date 2020
  fields Physics
and research's language is English




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Aberration-corrected electron microscopy can resolve the smallest atomic bond-lengths in nature. However, the high-convergence angles that enable spectacular resolution in 2D have unknown 3D resolution limits for all but the smallest objects ($< sim$8nm). We show aberration-corrected electron tomography offers new limits for 3D imaging by measuring several focal planes at each specimen tilt. We present a theoretical foundation for aberration-corrected electron tomography by establishing analytic descriptions for resolution, sampling, object size, and dose---with direct analogy to the Crowther-Klug criterion. Remarkably, aberration-corrected scanning transmission electron tomography can measure complete 3D specimen structure of unbounded object sizes up to a specified cutoff resolution. This breaks the established Crowther limit when tilt increments are twice the convergence angle or smaller. Unprecedented 3D resolution is achievable across large objects. Atomic 3D imaging (1$unicode{xC5}$) is allowed across extended objects larger than depth-of-focus (e.g. $>$ 20nm) using available microscopes and modest specimen tilting ($<$ 3$^circ$). Furthermore, aberration-corrected tomography follows the rule of dose-fractionation where a specified total dose can be divided among tilts and defoci.



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For quantitative electron microscopy high precision position information is necessary so that besides an adequate resolution and sufficiently strong contrast of atoms, small width of peaks which represent atoms in structural images is needed. Size of peak is determined by point spread (PS) of instruments as well as that of atoms when point resolution reach the subangstrom scale and thus PS of instruments is comparable with that of atoms. In this article, relationship between PS with atomic numbers, sample thickness, and spherical aberration coefficients will be studied in both negative Cs imaging (NCSI) and positive Cs imaging (PCSI) modes by means of dynamical image simulation. Through comparing the peak width with different thickness and different values of spherical aberration, NCSI mode is found to be superior to PCSI considering smaller peak width in the structural image.
In this work, an optic fiber based $textit{in situ}$ illumination system integrated into an aberration-corrected environmental transmission electron microscope (ETEM) is designed, built, characterized and applied. With this illumination system, the dynamic responses of photoactive materials to photons can be directly observed at the atomic level, and other stimuli including heating and various gases can also be applied simultaneously. Either a broadband light source or a high power laser source aiming to expedite photoreactions can be utilized, fitting different application needs. The optic fiber enters the ETEM through the objective aperture port, with a carefully designed curvature and a 30{deg} cut at the tip to orient the emitted light upwards onto the TEM specimen. The intensity distributions striking the sample from the broadband and laser sources are both measured, and due to the non-uniform distributions, an alignment procedure has been developed to align the bright spot with the electron optical axis of the TEM. The imaging and spectroscopy performances of the ETEM are proved to be maintained after incorporating this illumination system. Furthermore, Langmuir evaporation is observed when in situ laser light is applied to GaAs, demonstrating the phenomenon of optical heating on suitable semiconductor materials.
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