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Hot embossing of Au- and Pb- based alloys for X ray grating fabrication

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 Added by Lucia Romano
 Publication date 2018
  fields Physics
and research's language is English




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Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues. For the absorbing gratings, casting of highly x-ray absorbing metals, such as Au and Pb alloys, has proven to be a viable way to generate large area periodic high aspect ratio microstructures. In this paper, we review the grating fabrication strategy with a special focus on a novel approach of casting low temperature melting alloys (Au-Sn and Pbbased alloy) into Si grating templates using hot embossing. The process, similar to nanoimprint lithography, requires particular adjusting efforts of process parameters as a function of the metal alloy and the grating feature size. The transition between solid and liquid state depends on the alloy phase diagram, the applied pressure can damage the high aspect ratio Si lamellas and the microstructure of the solid metal can affect the grating structure. We demonstrate that metal casting by hot embossing can be used to fabricate gratings on large area (up to 70x70 mm2) with aspect ratio up to 50:1 and pitch in the range of 1-20 {mu}m.



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Today, hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated so far using the processes. However, with increasing requirements regarding the embossing surface and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by a process simulation and experimentally. The present publication shall report about the first results of the simulation - the modeling and simulation of large area replication based on an eight inch microstructured mold.
100 - Shenghao Wang , Can Zhang 2017
We reported the usage of grating-based X-ray phase-contrast imaging in nondestructive testing of grating imperfections. It was found that electroplating flaws could be easily detected by conventional absorption signal, and in particular, we observed that the grating defects resulting from uneven ultraviolet exposure could be clearly discriminated with phase-contrast signal. The experimental results demonstrate that grating-based X-ray phase-contrast imaging, with a conventional low-brilliance X-ray source, a large field of view and a reasonable compact setup, which simultaneously yields phase- and attenuation-contrast signal of the sample, can be ready-to-use in fast nondestructive testing of various imperfections in gratings and other similar photoetching products.
459 - X. C. Shan , Y. C. Liu , H. J. Lu 2008
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177 - Mingqian Li 2021
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