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Pushing the Limits of Broadband and High Frequency Metamaterial Silicon Antireflection Coatings

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 Added by Kevin Coughlin
 Publication date 2018
  fields Physics
and research's language is English




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Broadband refractive optics realized from high index materials provide compelling design solutions for the next generation of observatories for the Cosmic Microwave Background (CMB), and for sub-millimeter astronomy. In this paper, work is presented which extends the state of the art in silicon lenses with metamaterial antireflection (AR) coatings towards larger bandwidth and higher frequency operation. Examples presented include octave bandwidth coatings with less than $0.5%$ reflection, a prototype 4:1 bandwidth coating, and a coating optimized for 1.4 THz. For these coatings the detailed design, fabrication and testing processes are described as well as the inherent performance trade offs.



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126 - Karl Young , Qi Wen , Shaul Hanany 2017
We used two novel approaches to produce sub-wavelength structure (SWS) anti-reflection coatings (ARC) on silicon for the millimeter and sub-millimeter (MSM) wave band: picosecond laser ablation and dicing with beveled saws. We produced pyramidal structures with both techniques. The diced sample, machined on only one side, had pitch and height of 350 $mu$m and 972 $mu$m. The two laser ablated samples had pitch of 180 $mu$m and heights of 720 $mu$m and 580 $mu$m; only one of these samples was ablated on both sides. We present measurements of shape and optical performance as well as comparisons to the optical performance predicted using finite element analysis and rigorous coupled wave analysis. By extending the measured performance of the one-sided diced sample to the two-sided case, we demonstrate 25 % band averaged reflectance of less than 5 % over a bandwidth of 97 % centered on 170 GHz. Using the two-sided laser ablation sample, we demonstrate reflectance less than 5 % over 83 % bandwidth centered on 346 GHz.
Infrared (IR) blocking filters are crucial for controlling the radiative loading on cryogenic systems and for optimizing the sensitivity of bolometric detectors in the far-IR. We present a new IR filter approach based on a combination of patterned frequency selective structures on silicon and a thin (50 $mu textrm{m}$ thick) absorptive composite based on powdered reststrahlen absorbing materials. For a 300 K blackbody, this combination reflects $sim$50% of the incoming light and blocks textgreater 99.8% of the total power with negligible thermal gradients and excellent low frequency transmission. This allows for a reduction in the IR thermal loading to negligible levels in a single cold filter. These composite filters are fabricated on silicon substrates which provide excellent thermal transport laterally through the filter and ensure that the entire area of the absorptive filter stays near the bath temperature. A metamaterial antireflection coating cut into these substrates reduces in-band reflections to below 1%, and the in-band absorption of the powder mix is below 1% for signal bands below 750 GHz. This type of filter can be directly incorporated into silicon refractive optical elements.
We present two prescriptions for broadband (~77 - 252 GHz), millimeter-wave antireflection coatings for cryogenic, sintered polycrystalline aluminum oxide optics: one for large-format (700 mm diameter) planar and plano-convex elements, the other for densely packed arrays of quasi-optical elements, in our case 5 mm diameter half-spheres (called lenslets). The coatings comprise three layers of commercially-available, polytetrafluoroethylene-based, dielectric sheet material. The lenslet coating is molded to fit the 150 mm diameter arrays directly while the large-diameter lenses are coated using a tiled approach. We review the fabrication processes for both prescriptions then discuss laboratory measurements of their transmittance and reflectance. In addition, we present the inferred refractive indices and loss tangents for the coating materials and the aluminum oxide substrate. We find that at 150 GHz and 300 K the large-format coating sample achieves (97 +/- 2)% transmittance and the lenslet coating sample achieves (94 +/- 3)% transmittance.
Three-dimensional direct laser writing via two photon polymerization is used to fabricate anti-reflective structured surfaces composed of sub-wavelength conicoid features optimized to operate over a wide bandwidth in the near-infrared range from 3700 cm$^{-1}$ to 6600 cm$^{-1}$ (2.7 to 1.52 $mu$m). Analytic Bruggemann effective medium calculations are used to predict nominal geometric parameters such as the fill factor of the constitutive conicoid features of the anti-reflective structured surfaces presented here. The performance of the anti-reflective structured surfaces was investigated experimentally using infrared transmission measurements. An enhancement of the transmittance by 1.35% to 2.14% over a broadband spectral range from 3700 cm$ ^{-1} $ to 6600 cm$^{-1}$ (2.7 to 1.52 $mu$m) was achieved. We further report on finite-element-based reflection and transmission data using three-dimensional model geometries for comparison. A good agreement between experimental results and the finite-element-based numerical analysis is observed once as-fabricated deviations from the nominal conicoid forms are included in the model. Three-dimensional direct laser writing is demonstrated here as an efficient method for the fabrication and optimization of anti-reflective structured surfaces designed for the infrared spectral range.
The Simons Observatory (SO) will be a cosmic microwave background (CMB) survey experiment with three small-aperture telescopes and one large-aperture telescope, which will observe from the Atacama Desert in Chile. In total, SO will field over 60,000 transition-edge sensor (TES) bolometers in six spectral bands centered between 27 and 280 GHz in order to achieve the sensitivity necessary to measure or constrain numerous cosmological quantities, as outlined in The Simons Observatory Collaboration et al. (2019). These telescopes require 33 highly transparent, large aperture, refracting optics. To this end, we developed mechanically robust, highly efficient, metamaterial anti-reflection (AR) coatings with octave bandwidth coverage for silicon optics up to 46 cm in diameter for the 22-55, 75-165, and 190-310 GHz bands. We detail the design, the manufacturing approach to fabricate the SO lenses, their performance, and possible extensions of metamaterial AR coatings to optical elements made of harder materials such as alumina.
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