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We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides. We show microring resonators with a quality factor of 10$^7$ and waveguides with propagation loss as low as 2.7 dB/m.
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We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to times ten to the power of 8th at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion induced lattice damage, indicating an ultra-low waveguide propagation loss of about 0.28 dB per meter. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.
Lithium niobate on insulator (LNOI), regarded as an important candidate platform for optical integration due to its excellent nonlinear, electro-optic and other physical properties, has become a research hotspot. Light source, as an essential component for integrated optical system, is urgently needed. In this paper, we reported the realization of 1550-nm band on-chip LNOI microlasers based on erbium-doped LNOI ring cavities with loaded quality factors higher than one million, which were fabricated by using electron beam lithography and inductively coupled plasma reactive ion etching processes. These microlasers demonstrated a low pump threshold of ~20 {mu}W and stable performance under the pump of a 980-nm band continuous laser. Comb-like laser spectra spanning from 1510 nm to 1580 nm were observed in high pump power regime, which lays the foundation of the realization of pulsed laser and frequency combs on rare-earth ion doped LNOI platform. This work has effectively promoted the development of on-chip integrated active LNOI devices.
Modern communication networks require high performance and scalable electro-optic modulators that convert electrical signals to optical signals at high speed. Existing lithium niobate modulators have excellent performance but are bulky and prohibitively expensive to scale up. Here we demonstrate scalable and high-performance nanophotonic electro-optic modulators made of single-crystalline lithium niobate microring resonators and micro-Mach-Zehnder interferometers. We show a half-wave electro-optic modulation efficiency of 1.8V$cdot$cm and data rates up to 40 Gbps.
The absence of the single-photon nonlinearity has been a major roadblock in developing quantum photonic circuits at optical frequencies. In this paper, we demonstrate a periodically-poled thin film lithium niobate microring resonator (PPLNMR) that reaches 5,000,000%/W second harmonic conversion efficiency---almost 20-fold enhancement over the state-of-the-art---by accessing its largest $chi^{(2)}$ tensor component $d_{33}$ via quasi-phase matching. The corresponding single photon coupling rate $g/2pi$ is estimated to be 1.2 MHz, which is an important milestone as it approaches the dissipation rate $kappa/2pi$ of best available lithium niobate microresonators developed in the community. Using a figure of merit defined as $g/kappa$, our devices reach a single photon nonlinearity approaching 1%. We show that, by further scaling of the device, it is possible to improve the single photon nonlinearity to a regime where photon-blockade effect can be manifested.
Lithium niobate is a multi-functional material, which has been regarded as one of the most promising platform for the multi-purpose optical components and photonic circuits. Targeting at the miniature optical components and systems, lithium niobate microstructures with feature sizes of several to hundreds of micrometers have been demonstrated, such as waveguides, photonic crystals, micro-cavities, and modulators, et al. In this paper, we presented subwavelength nanograting metasurfaces fabricated in a crystalline lithium niobate film, which hold the possibilities towards further shrinking the footprint of the photonic devices with new optical functionalities. Due to the collective lattice interactions between isolated ridge resonances, distinct transmission spectral resonances were observed, which could be tunable by varying the structural parameters. Furthermore, our metasurfaces are capable to show high efficiency transmission structural colors as a result of structural resonances and intrinsic high transparency of lithium niobate in visible spectral range. Our results would pave the way for the new types of ultracompact photonic devices based on lithium niobate.
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