Flexible superconducting Nb transmission lines on thin film polyimide for quantum computing applications

We describe progress and initial results achieved towards the goal of developing integrated multi-conductor arrays of shielded controlled-impedance flexible superconducting transmission lines with ultra-miniature cross sections and wide bandwidths (dc to >10 GHz) over meter-scale lengths. Intended primarily for use in future scaled-up quantum computing systems, such flexible thin-film Nb/polyimide ribbon cables provide a physically compact and ultra-low thermal conductance alternative to the rapidly increasing number of discrete coaxial cables that are currently used by quantum computing experimentalists to transmit signals between the low-temperature stages (from ~ 4 K down to ~ 20 mK) of a dilution refrigerator. S-parameters are presented for 2-metal layer Nb microstrip structures with lengths ranging up to 550 mm. Weakly coupled open-circuit microstrip resonators provided a sensitive measure of the overall transmission line loss as a function of frequency, temperature, and power. Two common polyimide dielectrics, one conventional and the other photo-definable (PI-2611 and HD-4100, respectively) were compared. Our most striking result, not previously reported to our knowledge, was that the dielectric loss tangents of both polyimides are remarkably low at deep cryogenic temperatures, typically 100$times$ smaller than corresponding room temperature values. This enables fairly long-distance transmission of microwave signals without excessive attenuation and permits usefully high rf power levels to be transmitted without creating excessive dielectric heating. We observed loss tangents as low as 2.2$times$10$^{-5}$ at 20 mK. Our fabrication techniques could be extended to more complex structures such as multiconductor, multi-layer stripline or rectangular coax, and integrated attenuators and thermalization structures.