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Casimir forces on a silicon micromechanical chip

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 Added by Jie Zou
 Publication date 2012
  fields Physics
and research's language is English




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Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here, by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes.

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Nanomechanical circuits for transverse acoustic waves promise to enable new approaches to computing, precision biochemical sensing and many other applications. However, progress is hampered by the lack of precise control of the coupling between nanomechanical elements. Here, we demonstrate virtual-phonon coupling between transverse mechanical elements, exploiting tunnelling through a zero-mode acoustic barrier. This allows the construction of large-scale nanomechanical circuits on a silicon chip, for which we develop a new scalable fabrication technique. As example applications, we build mode-selective acoustic mirrors with controllable reflectivity and demonstrate acoustic spatial mode filtering. Our work paves the way towards applications such as fully nanomechanical computer processors and distributed nanomechanical sensors, and to explore the rich landscape of nonlinear nanomechanical dynamics.
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Electrostatic and Casimir interactions limit the range of positional stability of electrostatically-actuated or capacitively-coupled mechanical devices. We investigate this range experimentally for a generic system consisting of a doubly-clamped Au suspended beam, capacitively-coupled to an adjacent stationary electrode. The mechanical properties of the beam, both in the linear and nonlinear regimes, are monitored as the attractive forces are increased to the point of instability. There pull-in occurs, resulting in permanent adhesion between the electrodes. We investigate, experimentally and theoretically, the position-dependent lifetimes of the free state (existing prior to pull-in). We find that the data cannot be accounted for by simple theory; the discrepancy may be reflective of internal structural instabilities within the metal electrodes.
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