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A numerical tool for analysing spatially anisotropic electron populations in electron cyclotron resonance (ECR) plasmas has been developed, using a trial-and-error electron energy distribution function (EEDF) fitting method. The method has been tested on space-resolved warm electrons in the energy range $2-20,mathrm{keV}$, obtained from self-consistent simulations modelling only electron dynamics in ECR devices, but lacked real-world validation. For experimentally benchmarking the method, we attempted to numerically reproduce the experimental X-ray emission spectrum measured from an argon plasma. Results of this analysis have provided crucial information about density and temperature of warm electrons, and competing distributions of warm and hot electron components. This information can be fed back to simulation models to generate more realistic data. Subsequent application of the numerical tool as described to the improved simulation data can result in continuous EEDFs that reflect the nature of charge distributions in anisotropic ECR plasmas. These functions can be also applied to electron dependent reactions, in order to reproduce experimental results, like those concerning space-dependent K$alpha$ emissions.
The highly advanced treatment of surfaces as etching and deposition is mainly enabled by the extraordinary properties of technological plasmas. The primary factors that influence these processes are the flux and the energy of various species, particu
We evaluate various analytical models for the electron-ion energy transfer and compare the results to data from molecular dynamics (MD) simulations. The models tested includes energy transfer via strong binary collisions, Landau-Spitzer rates with di
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform,
The local magnetic field in a Penning-Malmberg trap is found by measuring the temperatures that result when electron plasmas are illuminated by microwaves pulses. Multiple heating resonances are observed as the pulse frequencies are swept. The many r
The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be a