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Structural hierarchy is found in myriad biological systems and has improved man-made structures ranging from the Eiffel tower to optical cavities. Hierarchical metamaterials utilize structure at multiple size scales to realize new and highly desirable properties which can be strikingly different from those of the constituent materials. In mechanical resonators whose rigidity is provided by static tension, structural hierarchy can reduce the dissipation of the fundamental mode to ultralow levels due to an unconventional form of soft clamping. Here, we apply hierarchical design to silicon nitride nanomechanical resonators and realize binary tree-shaped resonators with quality factors as high as $10^9$ at 107 kHz frequency, reaching the parameter regime of levitated particles. The resonators thermal-noise-limited force sensitivities reach $740 mathrm{zN/sqrt{Hz}}$ at room temperature and $mathrm{90 zN/sqrt{Hz}}$ at 6 K, surpassing state-of-the-art cantilevers currently used for force microscopy. We also find that the self-similar structure of binary tree resonators results in fractional spectral dimensions, which is characteristic of fractal geometries. Moreover, we show that the hierarchical design principles can be extended to 2D trampoline membranes, and we fabricate ultralow dissipation membranes suitable for interferometric position measurements in Fabry-Perot cavities. Hierarchical nanomechanical resonators open new avenues in force sensing, signal transduction and quantum optomechanics, where low dissipation is paramount and operation with the fundamental mode is often advantageous.
In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers and at th
We experimentally investigate dissipation in mechanical resonators made of a disordered superconducting thin film of Molybdenum-Rhenium(MoRe) alloy. By electrostatically driving the drum with a resonant AC voltage, we detect its motion using a superc
We review a new implementation of Kelvin probe force microscopy (KPFM) in which the dissipation signal of frequency modulation atomic force microscopy (FM-AFM) is used for dc bias voltage feedback (D-KPFM). The dissipation arises from an oscillating
Ultralow dissipation plays an important role in sensing applications and exploring macroscopic quantum phenomena using micro-and nano-mechanical systems. We report a diamagnetic-levitated micro-mechanical oscillator operating at a low temperature of
Ultralight mechanical resonators based on low-dimensional materials are well suited as exceptional transducers of minuscule forces or mass changes. However, the low dimensionality also provides a challenge to minimize resistive losses and heating. He