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Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show
We derive a formula for the light field of a monochromatic plane wave that is truncated and reflected by a spherical mirror. Our formula is valid even for deep mirrors, where the aperture radius approaches the radius of curvature. We apply this resul
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional structures for o
We present a simple method to tune optical micro- and nanocavities with picometer precision in the resonant wavelength, corresponding to an effective sub atomic monolayer control of the cavity dimension. This is obtained through resonant photo-electr
The method of pulse-shape analysis (PSA) for particle identification (PID) was applied to a double-sided silicon strip detector (DSSD) with a strip pitch of 300 {mu}m. We present the results of test measurements with particles from the reactions of a