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Current density distributions in active integrated circuits (ICs) result in patterns of magnetic fields that contain structural and functional information about the IC. Magnetic fields pass through standard materials used by the semiconductor industry and provide a powerful means to fingerprint IC activity for security and failure analysis applications. Here, we demonstrate high spatial resolution, wide field-of-view, vector magnetic field imaging of static (DC) magnetic field emanations from an IC in different active states using a Quantum Diamond Microscope (QDM). The QDM employs a dense layer of fluorescent nitrogen-vacancy (NV) quantum defects near the surface of a transparent diamond substrate placed on the IC to image magnetic fields. We show that QDM imaging achieves simultaneous $sim10$ $mu$m resolution of all three vector magnetic field components over the 3.7 mm $times$ 3.7 mm field-of-view of the diamond. We study activity arising from spatially-dependent current flow in both intact and decapsulated field-programmable gate arrays (FPGAs); and find that QDM images can determine pre-programmed IC active states with high fidelity using machine-learning classification methods.
Devices relying on microwave circuitry form a cornerstone of many classical and emerging quantum technologies. A capability to provide in-situ, noninvasive and direct imaging of the microwave fields above such devices would be a powerful tool for the
We introduce a double quantum (DQ) 4-Ramsey measurement protocol that enables wide-field magnetic imaging using nitrogen vacancy (NV) centers in diamond, with enhanced homogeneity of the magnetic sensitivity relative to conventional single quantum (S
The optical selection rules in epitaxial quantum dots are strongly influenced by the orientation of their natural quantization axis, which is usually parallel to the growth direction. This configuration is well suited for vertically emitting devices,
Quantum sensors based on nitrogen-vacancy centers in diamond have emerged as a promising detection modality for nuclear magnetic resonance (NMR) spectroscopy owing to their micron-scale detection volume and non-inductive based detection. A remaining
We provide an overview of the experimental techniques, measurement modalities, and diverse applications of the Quantum Diamond Microscope (QDM). The QDM employs a dense layer of fluorescent nitrogen-vacancy (NV) color centers near the surface of a tr