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The geometric, kinetic, and total inductances and the attenuation constant are theoretically analyzed for a thin-film superconducting coplanar waveguide (CPW) resonator consisting of a current-carrying central conductor, adjacent slots, and ground planes that return the current. The analysis focuses on films of thickness $d$ obeying $d < 2lambda$ ($lambda$ is the London penetration depth), for which the material properties are characterized by the two-dimensional screening length $Lambda = 2 lambda^2/d$. Introducing a cut-off procedure that guarantees that the magnitudes of the currents in the central conductor and the ground planes are equal, new and simpler results are obtained for the kinetic inductance and the attenuation constant for small $Lambda$. Exact results for arbitrary $Lambda$ are presented for the geometric, kinetic, and total inductances in the limit of tiny slot widths, and approximate results are presented for arbitrary slot widths.
We fabricated superconducting coplanar waveguide resonator with leads for dc bias, which enables the ac conductivity measurement under dc bias. The current and the magnetic field dependences of resonance properties were measured, and hysteretic behav
We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanoscopic constrictions. By reducing the size of the center line down to 50 nm, the radio frequency currents are concentrated and the mag
Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and internal quality factor measurements were taken at millikelvin temperatures
We have measured noise in thin-film superconducting coplanar waveguide resonators. This noise appears entirely as phase noise, equivalent to a jitter of the resonance frequency. In contrast, amplitude fluctuations are not observed at the sensitivity
We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures of $20 rm{m