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We present the integrated chip-scale tuning of multiple photonic crystal cavities. The optimized implementation allows effective and precise tuning of multiple cavity resonances (up to ~1.60 nm/mW) and inter-cavity phase (~ 0.038 pi/mW) by direct local temperature tuning on silicon nanomembranes. Through designing the serpentine metal electrodes and careful electron-beam alignment to avoid cavity mode overlap, the coupled photonic crystal L3 cavities preserve their high quality factors. The deterministic resonance and phase control enables switching between the all-optical analogue of electromagnetically-induced-transparency (EIT) to flat-top filter lineshapes, with future applications of trapping photons/photonic transistors and optoelectronic modulators.
We demonstrate temporal group delays in coherently-coupled high-Q multi-cavity photonic crystals, in an all-optical analogue to electromagnetically induced transparency. We report deterministic control of the group delay up to 4x the single cavity li
We demonstrate a new photo-induced oxidation technique for tuning GaAs photonic crystal cavities using a $390~mathrm{nm}$ pulsed laser with an average power of $10~mathrm{mu W}$. The laser oxidizes a small $left(sim 500~mathrm{nm}right)$ diameter spo
We describe the design, fabrication, and spectroscopy of coupled, high Quality (Q) factor silicon nanobeam photonic crystal cavities. We show that the single nanobeam cavity modes are coupled into even and odd superposition modes, and we simulate the
We demonstrate digital tuning of the slow-light regime in silicon photonic-crystal waveguides by performing atomic layer deposition of hafnium oxide. The high group-index regime was deterministically controlled (red-shift of 140 +/- 10 pm per atomic
We demonstrate a method to locally change the refractive index in planar optical devices by photodarkening of a thin chalcogenide glass layer deposited on top of the device. The method is used to tune the resonance of GaAs-based photonic crystal cavi