Superconducting microwave resonators are reliable circuits widely used for detection and as test devices for material research. A reliable determination of their external and internal quality factors is crucial for many modern applications, which eit
her require fast measurements or operate in the single photon regime with small signal to noise ratios. Here, we use the circle fit technique with diameter correction and provide a step by step guide for implementing an algorithm for robust fitting and calibration of complex resonator scattering data in the presence of noise. The speedup and robustness of the analysis are achieved by employing an algebraic rather than an iterative fit technique for the resonance circle.
We report on hybrid circuit QED experiments with focused ion beam implanted Er$^{3+}$ ions in Y$_2$SiO$_5$ coupled to an array of superconducting lumped element microwave resonators. The Y$_2$SiO$_5$ crystal is divided into several areas with distinc
t erbium doping concentrations, each coupled to a separate resonator. The coupling strength is varied from 5 MHz to 18.7 MHz, while the linewidth ranges between 50 MHz and 130 MHz. We confirm the paramagnetic properties of the implanted spin ensemble by evaluating the temperature dependence of the coupling. The efficiency of the implantation process is analyzed and the results are compared to a bulk doped Er:Y$_2$SiO$_5$ sample. We demonstrate the successful integration of these engineered erbium spin ensembles with superconducting circuits.
