We present a combined scanning force and tunneling microscope working in a dilution refrigerator that is optimized for the study of individual electronic nano-devices. This apparatus is equipped with commercial piezo-electric positioners enabling the
displacement of a sample below the probe over several hundred microns at very low temperature, without excessive heating. Atomic force microscopy based on a tuning fork resonator probe is used for cryogenic precise alignment of the tip with an individual device. We demonstrate the local tunneling spectroscopy of a hybrid Josephson junction as a function of its current bias.
Scanning tunneling spectroscopies are performed below 100~mK on nano-crystalline boron-doped diamond films characterized by Transmission Electron Microscopy and transport measurements. We demonstrate a strong correlation between the local superconduc
tivity strength and the granular structure of the films. The study of the spectral shape, amplitude and temperature dependence of the superconductivity gap enables us to differentiate intrinsically superconducting grains that follow the BCS model, from grains showing a different behavior involving the superconducting proximity effect.
