We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators under equiva
lent conditions. The high achievable filling factor even for small sized samples and the relatively high Q-factor result in a sensitivity that is superior to that of conventional waveguide resonators, in particular to spins close to the sample surface. The peak microwave power is on the order of a few microwatts, which is compatible with measurements at ultra low temperatures. We also discuss the effect of the nonuniform microwave magnetic field on the Hahn echo power dependence.
We report electron spin resonance (ESR) measurements on a large-area silicon MOSFET. An ESR signal at g-factor 1.9999(1), and with a linewidth of 0.6 G, is observed and found to arise from two-dimensional (2D) electrons at the Si/SiO2 interface. The
signal and its intensity show a pronounced dependence on applied gate voltage. At gate voltages below the threshold of the MOSFET, the signal is from weakly confined, isolated electrons as evidenced by the Curie-like temperature dependence of its intensity. The situation above threshold appears more complicated. These large-area MOSFETs provide the capability to controllably tune from insulating to conducting regimes by adjusting the gate voltage while monitoring the state of the 2D electron spins spectroscopically.
