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Register a new userAnalysing the linearised radially polarised light source for improved precision in strain measurement using micro-Raman spectroscopy
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Added by
Viveksharma Prabhakara
Publication date
2021
fields
Physics
and research's language is
English
Authors
V. Prabhakara
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Strain engineering in semiconductor transistor devices has become vital in the semiconductor industry due to the ever increasing need for performance enhancement at the nanoscale. Raman spectroscopy is a non-invasive measurement technique with high sensitivity to mechanical stress that does not require any special sample preparation procedures in comparison to characterization involving transmission electron microscopy (TEM), making it suitable for inline strain measurement in the semiconductor industry. Indeed at present, strain measurements using Raman spectroscopy are already routinely carried out in semiconductor devices as it is cost effective, fast and non-destructive. In this paper we explore the usage of linearised-radially polarised light as an excitation source, which does provide significantly enhanced accuracy and precision as compared to linearly polarised light for this application. Numerical simulations are done to quantitatively evaluate the electric field intensities that contribute to this enhanced sensitivity. We benchmark the experimental results against TEM diffraction-based techniques like nano-beam diffraction and Bessel diffraction. Differences between both approaches are assigned to strain relaxation due to sample thinning required in TEM setups, demonstrating the benefit of Raman for nondestructive inline testing.
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When focusing a light beam at high numerical aperture, the resulting electric field profile in the focal plane depends on the transverse polarisation profile, as interference between different parts of the beam needs to be taken into account. It is well known that radial polarised light produces a longitudinal polarisation component and can be focused below the conventional diffraction limit for homogeneously polarised light, and azimuthally polarised light that carries one unit of angular momentum can achieve even tighter focal spots. This is of interest for example for enhancing resolution in scanning microscopy. There are numerous ways to generate such polarisation structures, however, setups can be expensive and usually rely on birefringent components, hence prohibiting broadband operation. We have recently demonstrated a passive, low-cost technique using a simple glass cone (Fresnel cone) to generate beams with structured polarisation. We show here that the polarisation structure generated by Fresnel cones focuses better than radial polarised light at all numerical apertures. Furthermore, we investigate in detail the application of polarised light structures for two-photon microscopy. Specifically we demonstrate a method that allows us to generate the desired polarisation structure at the back aperture of the microscope by pre-compensating any detrimental phase shifts using a combination of waveplates.
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