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Silicon Nitride Waveguides for Plasmon Optical Trapping and Sensing Applications

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 Added by Qiancheng Zhao
 Publication date 2015
  fields Physics
and research's language is English




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We demonstrate a silicon nitride trench waveguide deposited with bowtie antennas for plasmonic enhanced optical trapping. The sub-micron silicon nitride trench waveguides were fabricated with conventional optical lithography in a low cost manner. The waveguides embrace not only low propagation loss and high nonlinearity, but also the inborn merits of combining micro-fluidic channel and waveguide together. Analyte contained in the trapezoidal trench channel can interact with the evanescent field from the waveguide beneath. The evanescent field can be further enhanced by plasmonic nanostructures. With the help of gold nano bowtie antennas, the studied waveguide shows outstanding trapping capability on 10 nm polystyrene nanoparticles. We show that the bowtie antennas can lead to 60-fold enhancement of electric field in the antenna gap. The optical trapping force on a nanoparticle is boosted by three orders of magnitude. A strong tendency shows the nanoparticle is likely to move to the high field strength region, exhibiting the trapping capability of the antenna. Gradient force in vertical direction is calculation by using a point-like dipole assumption, and the analytical solution matches the full-wave simulation well. The investigation indicates that nanostructure patterned silicon nitride trench waveguide is suitable for optical trapping and nanoparticle sensing applications.

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We theoretically investigate the use of Rayleigh surface acoustic waves (SAWs) for refractive index modulation in optical waveguides consisting of amorphous dielectrics. Considering low-loss Si$_3$N$_4$ waveguides with a standard core cross section of 4.4$times$0.03 $mu$m$^2$ size, buried 8 $mu$m deep in a SiO$_2$ cladding we compare surface acoustic wave generation in various different geometries via a piezo-active, lead zirconate titanate film placed on top of the surface and driven via an interdigitized transducer (IDT). Using numerical solutions of the acoustic and optical wave equations, we determine the strain distribution of the SAW under resonant excitation. From the overlap of the acoustic strain field with the optical mode field we calculate and maximize the attainable amplitude of index modulation in the waveguide. For the example of a near-infrared wavelength of 840 nm, a maximum shift in relative effective refractive index of 0.7x10$^{-3}$ was obtained for TE polarized light, using an IDT period of 30 - 35 $mu$m, a film thickness of 2.5 - 3.5 $mu$m, and an IDT voltage of 10 V. For these parameters, the resonant frequency is in the range 70 - 85 MHz. The maximum shift increases to 1.2x10$^{-3}$, with a corresponding resonant frequency of 87 MHz, when the height of the cladding above the core is reduced to 3 $mu$m. The relative index change is about 300-times higher than in previous work based on non-resonant proximity piezo-actuation, and the modulation frequency is about 200-times higher. Exploiting the maximum relative index change of 1.2$times$10$^{-3}$ in a low-loss balanced Mach-Zehnder modulator should allow full-contrast modulation in devices as short as 120 $mu$m (half-wave voltage length product = 0.24 Vcm).
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