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Design and Testing of Kinetic Inductance Detectors Made of Titanium Nitride

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 Added by Pascale Diener
 Publication date 2013
  fields Physics
and research's language is English




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To use highly resistive material for Kinetic Inductance Detectors (KID), new designs have to be done, in part due to the impedance match needed between the KID chip and the whole 50 ohms readout circuit. Chips from two new hybrid designs, with an aluminum throughline coupled to titanium nitride microresonators, have been measured and compared to a TiN only chip. In the hybrid chips, parasitic temperature dependent box resonances are absent. The dark KID properties have been measured in a large set of resonators. A surprisingly long lifetime, up to 5.6 ms is observed in a few KIDs. For the other more reproducible devices, the mean electrical Noise Equivalent Power is 5.4 10-19 W.Hz1/2.



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We report on the design and performance of Microwave Kinetic Inductance Detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 $mu Omega$ cm with an RRR = 1.6. Resonators on the device displayed internal quality factors of around 200,000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening parameter in the superconducting density of states. Finally, we show that this material and design is compatible with a full-array fabrication process which resulted in pixels with decay times of about 40 $mu$s and resolving powers of ~9 at 800 nm.
We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of 1.4~K. Micro-machining of the silicon-on-insulator wafer backside creates a quarter-wavelength backshort optimized for efficient coupling at 250~micron. Using frequency read out and when viewing a variable temperature blackbody source, we measure device noise consistent with photon noise when the incident optical power is $>$~0.5~pW, corresponding to noise equivalent powers $>$~3$times 10^{-17}$ W/$sqrt{mathrm{Hz}}$. This sensitivity makes these devices suitable for broadband photometric applications at these wavelengths.
We designed, fabricated, and characterized four arrays of horn--coupled, lumped element kinetic inductance detectors (LEKIDs), optimized to work in the spectral bands of the balloon-borne OLIMPO experiment. OLIMPO is a 2.6 m aperture telescope, aimed at spectroscopic measurements of the Sunyaev-Zeldovich (SZ) effect. OLIMPO will also validate the LEKID technology in a representative space environment. The corrected focal plane is filled with diffraction limited horn-coupled KID arrays, with 19, 37, 23, 41 active pixels respectively at 150, 250, 350, and 460$:$GHz. Here we report on the full electrical and optical characterization performed on these detector arrays before the flight. In a dark laboratory cryostat, we measured the resonator electrical parameters, such as the quality factors and the electrical responsivities, at a base temperature of 300$:$mK. The measured average resonator $Q$s are 1.7$times{10^4}$, 7.0$times{10^4}$, 1.0$times{10^4}$, and 1.0$times{10^4}$ for the 150, 250, 350, and 460$:$GHz arrays, respectively. The average electrical phase responsivities on resonance are 1.4$:$rad/pW, 1.5$:$rad/pW, 2.1$:$rad/pW, and 2.1$:$rad/pW; the electrical noise equivalent powers are 45$:rm{aW/sqrt{Hz}}$, 160$:rm{aW/sqrt{Hz}}$, 80$:rm{aW/sqrt{Hz}}$, and 140$:rm{aW/sqrt{Hz}}$, at 12 Hz. In the OLIMPO cryostat, we measured the optical properties, such as the noise equivalent temperatures (NET) and the spectral responses. The measured NET$_{rm RJ}$s are $200:murm{Ksqrt{s}}$, $240:murm{Ksqrt{s}}$, $240:murm{Ksqrt{s}}$, and $:340murm{Ksqrt{s}}$, at 12 Hz; under 78, 88, 92, and 90 mK Rayleigh-Jeans blackbody load changes respectively for the 150, 250, 350, and 460 GHz arrays. The spectral responses were characterized with the OLIMPO differential Fourier transform spectrometer (DFTS) up to THz frequencies, with a resolution of 1.8 GHz.
In Kinetic Inductance Detectors (KIDs) and other similar applications of superconducting microresonators, both the large and small-signal behaviour of the device may be affected by electrothermal feedback. Microwave power applied to read out the device is absorbed by and heats the superconductor quasiparticles, changing the superconductor conductivity and hence the readout power absorbed in a positive or negative feedback loop. In this work, we explore numerically the implications of an extensible theoretical model of a generic superconducting microresonator device for a typical KID, incorporating recent work on the power flow between superconductor quasiparticles and phonons. This model calculates the large-signal (changes in operating point) and small-signal behaviour of a device, allowing us to determine the effect of electrothermal feedback on device responsivity and noise characteristics under various operating conditions. We also investigate how thermally isolating the device from the bath, for example by designing the device on a membrane only connected to the bulk substrate by thin legs, affects device performance. We find that at a typical device operating point, positive electrothermal feedback reduces the effective thermal conductance from the superconductor quasiparticles to the bath, and so increases responsivity to signal (pair-breaking) power, increases noise from temperature fluctuations, and decreases the Noise Equivalent Power (NEP). Similarly, increasing the thermal isolation of the device while keeping the quasiparticle temperature constant decreases the NEP, but also decreases the device response bandwidth.
Large ultra-sensitive detector arrays are needed for present and future observatories for far infra-red, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled Microwave Kinetic Inductance Detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the $sim-30$ dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is almost identical to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor $>$10. With the on-chip stray light absorber the point source response is close to simulations down to the $sim-35$ dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.
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