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Register a new userMems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
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Added by
EDA Publishing Association
Publication date
2008
fields
Informatics Engineering
and research's language is
English
Authors
L. Grasser
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Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
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We report on measurements performed at low temperatures on a nanoelectromechanical system (NEMS) under (capacitive) parametric pumping. The excitations and detection schemes are purely electrical, and enable in the present experiment the straightforward measurement of forces down to about a femtonewton, for displacements of an Angstrom, using standard room temperature electronics. We demonstrate that a small (linear) force applied on the device can be amplified up to more than a 100 times, while the system is {it truly moving}. We explore the dynamics up to about 50$~$nm deflections for cantilevers about 200$~$nm thick by 3$~$$mu$m long oscillating at a frequency of 7$~$MHz. We present a generic modeling of nonlinear parametric amplification, and give analytic theoretical solutions enabling the fit of experimental results. We finally discuss the practical limits of the technique, with a particular application: the measurement of {it anelastic damping} in the metallic coating of the device with an exceptional resolution of about 0.5$~$%.
In this paper, we presented the design and development of a new integrated device for measuring heart rate using fingertip to improve estimating the heart rate. As heart related diseases are increasing day by day, the need for an accurate and affordable heart rate measuring device or heart monitor is essential to ensure quality of health. However, most heart rate measuring tools and environments are expensive and do not follow ergonomics. Our proposed Heart Rate Measuring (HRM) device is economical and user friendly and uses optical technology to detect the flow of blood through index finger. Three phases are used to detect pulses on the fingertip that include pulse detection, signal extraction, and pulse amplification. Qualitative and quantitative performance evaluation of the device on real signals shows accuracy in heart rate estimation, even under intense of physical activity. We compared the performance of HRM device with Electrocardiogram reports and manual pulse measurement of heartbeat of 90 human subjects of different ages. The results showed that the error rate of the device is negligible.
This paper presents one MEMS design tool with total six design flows, which makes it possible that the MEMS designers are able to choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are lumped-element model based system level, finite element analysis based device level and process level, which covers nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that the enough flexibility in the design flow can really increase the design efficiency.
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the components non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
A recent article [W.C.W. Huang and H. Batelaan, arXiv:1708.0057v1] analysed the dualism between optical and difference parametric amplification, performing a classical analysis of a system where two electromagnetic fields are produced by another of a frequency which is the difference of the frequency of the other two. The authors claimed that this process would not violate energy conservation at the classical level, but that a quantum description would necessarily require a non-Hermitian Hamiltonian and therefore would not exist. In this work we show that the process can proceed quantum mechanically if described by the correct Hamiltonian, that energy conservation is not violated, and that fields are produced with interesting quantum statistics. Furthermore, we show that the process can be thought of as different types of already known three-wave mixing processes, with the actual type depending on either initial conditions or personal preference.
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