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Register a new userArchitecture for Integrated Mems Resonators Quality Factor Measurement
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Added by
EDA Publishing Association
Publication date
2008
fields
Informatics Engineering
and research's language is
English
Authors
H. Mathias
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In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the components non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
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